|
|
|
||||
| Ion implanter - HV terminal 500 kV | Balzers SPUTTRON II thin film deposition system | Glancing angle deposition system (GLAD) | ||||
|
|
||||||
|
|
|
||||
| SPECSTM XPS (X-ray photoelectron spectroscopy) | HORIBA JOBIN YVON ihr320 Ellipsometer | evico magnetics Kerr Microscope & Magnetometer | ||||
|
|
||||||
 |
 |
 |
||||
|
SEM - JEOL 25N with EPMA |
ANA - HV thin film deposition unit with dual ion beams | JANDEL Universal Probe (4 - point measurement of sheet resistivity, and 3 - point spreading resistance measurement) | ||||
|
|
||||||
 |
 |
 |
||||
| Balzers BAK 550 evaporation system | VEECO MultiMode Quadrex SPM (AFM) | Talistep - thin film thickness and surface roughness measurements | ||||
|
|
 |
||||
| MTI GSL 1600X Vacuum Furnace | Zeiss Axio Imager Upright Camera | MTI Programmable Spin Coater | ||||
